Program » Industry Session

MEMS Innovations from R&D to Market - Sunday, 15 January 2022

We welcome you to the IEEE MEMS Industry Session and hear from the top MEMS companies bringing MEMS products out of R&D, into the market, and into the hands of consumers. Listen to stories from the top MEMS companies as well as the hottest new startups. Don't miss out on this exciting session and be sure to plan your arrival early enough to attend.

The event is free of charge for all IEEE MEMS 2023 registered attendees.

EUV HIGH-NA LITHOGRAPHY - PROCESS AND METROLOGY ASPECTS FOR MIRROR FABRICATION
Wilhelm Kühn
Carl Zeiss SMT GmbH, GERMANY

FROM IDEA TO PRODUCT - FROM ONE TO ONE BILLION
Alfons Dehe
Hahn-Schickard Freiburg, GERMANY

MEMS MIRROR TECHNOLOGY - KEY ENABLER FOR AUGMENTED REALITY SMARTGLASSES Ulrich Hofmann
OQmented, GERMANY

ENVIRONMENTAL SENSORS - THE QUEST FOR SURVIVAL
Christoph Schelling
Robert Bosch GmbH, GERMANY

SILICON MICROGRAVITY: RESONANT MEMS TECHNOLOGY FOR GRAVIMETRY AND PRECISION INERTIAL SENSING
Ashwin A. Seshia
Silicon Microgravity, Ltd. And University of Cambridge, UK

Anton Hofmeister
ST Microelectronics, ITALY

THE LED OF ACOUSTICS
Ferrucio Bottoni
USound, AUSTRIA